Automation of precise gas control for material-process researches; Application to synchrotron radiation real-time observation of surface reactions

Nakamura, Takafumi*; Yamamoto, Yukio*; Arakawa, Masakazu*; Maruyama, Akio*; Yoshigoe, Akitaka

Sangyo Oyo Kogakukai Rombunshi, 11(2), p.109 - 114, 2023/09

https://doi.org/10.12792/jjiiae.11.2.109

Surface chemistry experimental end-station at BL23SU in SPring-8 is widely used to study various surfaces and interfaces of functional materials by means of soft X-rays synchrotron radiation. To analyze surface chemical reactions between gas and solid surfaces, an accurate control of flow-rates of gases is essential. This paper describes a computerized automatic gas flow control system to improve the accuracy and reproducibility of gas-surface reaction experiments in the pressure range of ultra-high vacuum (molecular flow) conditions. The system uses feedback control to operate the slow-leak valve to control the gas-pressure. As a result, the system achieved results equivalent to those of a skilled experimenter.

Reactiving Response Analysis for the Design of Automatic Power Level Control System of JRR-3

; *; *; ;

JAERI-M 84-118, 61 Pages, 1984/07

JAERI-M-84-118.pdf:1.29MB

no abstracts in English